Vapor-phase self-assembled monolayers for improved MEMS reliability

Anna Rissanen, Kirsi Tappura, Mari Laamanen, Riikka Puurunen, E. Färm, M. Ritala, M. Leskelä

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Abstract: This paper presents the application of vapor-phase DDMS (dichlorodimethylsilane) self-assembled monolayer (SAM) coating which significantly reduced stiction behavior in optical MEMS components exposed to humidity. Previously SAMs have been deposited in liquid form, making them unsuitable for application in high aspect ratio MEMS/NEMS structures; now vapor-phase SAM deposition is a novel option for improving MEMS in-use reliability. DDMS and ODS (noctadecyltrimethoxysilane) SAM coatings were tested on surfaces with different pre-treatments and the quality of coatings was assessed through static water contact angle measurements and humidity exposure tests for both test membrane structures (100% stiction on uncoated structures vs. 17% stiction of DDMS SAM coated structures) and optical MEMS FPI components (0% stiction of DDMS SAM coated components). The obtained contact angle of the DDMS SAM coating was ~ 104°. Both long term stability and thermal stability of the DDMS SAM coatings were found to be good.
Original languageEnglish
Title of host publicationProceedings of IEEE Sensors 2010
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages767-770
ISBN (Print)978-142448168-2
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
Event9th IEEE Sensors Conference SENSORS 2010 - Kona, United States
Duration: 1 Nov 20104 Nov 2010

Conference

Conference9th IEEE Sensors Conference SENSORS 2010
CountryUnited States
CityKona
Period1/11/104/11/10

Fingerprint

Self assembled monolayers
MEMS
Stiction
Vapors
Coatings
MOEMS
Contact angle
Atmospheric humidity
NEMS
Membrane structures
Electronic mail
Angle measurement
Aspect ratio
Thermodynamic stability
Liquids
Water

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Rissanen, A., Tappura, K., Laamanen, M., Puurunen, R., Färm, E., Ritala, M., & Leskelä, M. (2010). Vapor-phase self-assembled monolayers for improved MEMS reliability. In Proceedings of IEEE Sensors 2010 (pp. 767-770). Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/ICSENS.2010.5690769
Rissanen, Anna ; Tappura, Kirsi ; Laamanen, Mari ; Puurunen, Riikka ; Färm, E. ; Ritala, M. ; Leskelä, M. / Vapor-phase self-assembled monolayers for improved MEMS reliability. Proceedings of IEEE Sensors 2010. Institute of Electrical and Electronic Engineers IEEE, 2010. pp. 767-770
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abstract = "Download PDF Download Citation View References Email Request Permissions Export to Collabratec AlertsAbstract: This paper presents the application of vapor-phase DDMS (dichlorodimethylsilane) self-assembled monolayer (SAM) coating which significantly reduced stiction behavior in optical MEMS components exposed to humidity. Previously SAMs have been deposited in liquid form, making them unsuitable for application in high aspect ratio MEMS/NEMS structures; now vapor-phase SAM deposition is a novel option for improving MEMS in-use reliability. DDMS and ODS (noctadecyltrimethoxysilane) SAM coatings were tested on surfaces with different pre-treatments and the quality of coatings was assessed through static water contact angle measurements and humidity exposure tests for both test membrane structures (100{\%} stiction on uncoated structures vs. 17{\%} stiction of DDMS SAM coated structures) and optical MEMS FPI components (0{\%} stiction of DDMS SAM coated components). The obtained contact angle of the DDMS SAM coating was ~ 104°. Both long term stability and thermal stability of the DDMS SAM coatings were found to be good.",
author = "Anna Rissanen and Kirsi Tappura and Mari Laamanen and Riikka Puurunen and E. F{\"a}rm and M. Ritala and M. Leskel{\"a}",
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Rissanen, A, Tappura, K, Laamanen, M, Puurunen, R, Färm, E, Ritala, M & Leskelä, M 2010, Vapor-phase self-assembled monolayers for improved MEMS reliability. in Proceedings of IEEE Sensors 2010. Institute of Electrical and Electronic Engineers IEEE, pp. 767-770, 9th IEEE Sensors Conference SENSORS 2010, Kona, United States, 1/11/10. https://doi.org/10.1109/ICSENS.2010.5690769

Vapor-phase self-assembled monolayers for improved MEMS reliability. / Rissanen, Anna; Tappura, Kirsi; Laamanen, Mari; Puurunen, Riikka; Färm, E.; Ritala, M.; Leskelä, M.

Proceedings of IEEE Sensors 2010. Institute of Electrical and Electronic Engineers IEEE, 2010. p. 767-770.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AU - Tappura, Kirsi

AU - Laamanen, Mari

AU - Puurunen, Riikka

AU - Färm, E.

AU - Ritala, M.

AU - Leskelä, M.

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N2 - Download PDF Download Citation View References Email Request Permissions Export to Collabratec AlertsAbstract: This paper presents the application of vapor-phase DDMS (dichlorodimethylsilane) self-assembled monolayer (SAM) coating which significantly reduced stiction behavior in optical MEMS components exposed to humidity. Previously SAMs have been deposited in liquid form, making them unsuitable for application in high aspect ratio MEMS/NEMS structures; now vapor-phase SAM deposition is a novel option for improving MEMS in-use reliability. DDMS and ODS (noctadecyltrimethoxysilane) SAM coatings were tested on surfaces with different pre-treatments and the quality of coatings was assessed through static water contact angle measurements and humidity exposure tests for both test membrane structures (100% stiction on uncoated structures vs. 17% stiction of DDMS SAM coated structures) and optical MEMS FPI components (0% stiction of DDMS SAM coated components). The obtained contact angle of the DDMS SAM coating was ~ 104°. Both long term stability and thermal stability of the DDMS SAM coatings were found to be good.

AB - Download PDF Download Citation View References Email Request Permissions Export to Collabratec AlertsAbstract: This paper presents the application of vapor-phase DDMS (dichlorodimethylsilane) self-assembled monolayer (SAM) coating which significantly reduced stiction behavior in optical MEMS components exposed to humidity. Previously SAMs have been deposited in liquid form, making them unsuitable for application in high aspect ratio MEMS/NEMS structures; now vapor-phase SAM deposition is a novel option for improving MEMS in-use reliability. DDMS and ODS (noctadecyltrimethoxysilane) SAM coatings were tested on surfaces with different pre-treatments and the quality of coatings was assessed through static water contact angle measurements and humidity exposure tests for both test membrane structures (100% stiction on uncoated structures vs. 17% stiction of DDMS SAM coated structures) and optical MEMS FPI components (0% stiction of DDMS SAM coated components). The obtained contact angle of the DDMS SAM coating was ~ 104°. Both long term stability and thermal stability of the DDMS SAM coatings were found to be good.

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Rissanen A, Tappura K, Laamanen M, Puurunen R, Färm E, Ritala M et al. Vapor-phase self-assembled monolayers for improved MEMS reliability. In Proceedings of IEEE Sensors 2010. Institute of Electrical and Electronic Engineers IEEE. 2010. p. 767-770 https://doi.org/10.1109/ICSENS.2010.5690769