Vapor-phase self-assembled monolayers for improved MEMS reliability

Anna Rissanen, Kirsi Tappura, Mari Laamanen, Riikka Puurunen, E. Färm, M. Ritala, M. Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    Abstract: This paper presents the application of vapor-phase DDMS (dichlorodimethylsilane) self-assembled monolayer (SAM) coating which significantly reduced stiction behavior in optical MEMS components exposed to humidity. Previously SAMs have been deposited in liquid form, making them unsuitable for application in high aspect ratio MEMS/NEMS structures; now vapor-phase SAM deposition is a novel option for improving MEMS in-use reliability. DDMS and ODS (noctadecyltrimethoxysilane) SAM coatings were tested on surfaces with different pre-treatments and the quality of coatings was assessed through static water contact angle measurements and humidity exposure tests for both test membrane structures (100% stiction on uncoated structures vs. 17% stiction of DDMS SAM coated structures) and optical MEMS FPI components (0% stiction of DDMS SAM coated components). The obtained contact angle of the DDMS SAM coating was ~ 104°. Both long term stability and thermal stability of the DDMS SAM coatings were found to be good.
    Original languageEnglish
    Title of host publicationProceedings of IEEE Sensors 2010
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages767-770
    ISBN (Print)978-142448168-2
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication
    Event9th IEEE Sensors Conference SENSORS 2010 - Kona, United States
    Duration: 1 Nov 20104 Nov 2010

    Conference

    Conference9th IEEE Sensors Conference SENSORS 2010
    CountryUnited States
    CityKona
    Period1/11/104/11/10

    Fingerprint

    Self assembled monolayers
    MEMS
    Stiction
    Vapors
    Coatings
    MOEMS
    Contact angle
    Atmospheric humidity
    NEMS
    Membrane structures
    Electronic mail
    Angle measurement
    Aspect ratio
    Thermodynamic stability
    Liquids
    Water

    Cite this

    Rissanen, A., Tappura, K., Laamanen, M., Puurunen, R., Färm, E., Ritala, M., & Leskelä, M. (2010). Vapor-phase self-assembled monolayers for improved MEMS reliability. In Proceedings of IEEE Sensors 2010 (pp. 767-770). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ICSENS.2010.5690769
    Rissanen, Anna ; Tappura, Kirsi ; Laamanen, Mari ; Puurunen, Riikka ; Färm, E. ; Ritala, M. ; Leskelä, M. / Vapor-phase self-assembled monolayers for improved MEMS reliability. Proceedings of IEEE Sensors 2010. IEEE Institute of Electrical and Electronic Engineers , 2010. pp. 767-770
    @inproceedings{506123b48bdd46b1a46828b315543111,
    title = "Vapor-phase self-assembled monolayers for improved MEMS reliability",
    abstract = "Download PDF Download Citation View References Email Request Permissions Export to Collabratec AlertsAbstract: This paper presents the application of vapor-phase DDMS (dichlorodimethylsilane) self-assembled monolayer (SAM) coating which significantly reduced stiction behavior in optical MEMS components exposed to humidity. Previously SAMs have been deposited in liquid form, making them unsuitable for application in high aspect ratio MEMS/NEMS structures; now vapor-phase SAM deposition is a novel option for improving MEMS in-use reliability. DDMS and ODS (noctadecyltrimethoxysilane) SAM coatings were tested on surfaces with different pre-treatments and the quality of coatings was assessed through static water contact angle measurements and humidity exposure tests for both test membrane structures (100{\%} stiction on uncoated structures vs. 17{\%} stiction of DDMS SAM coated structures) and optical MEMS FPI components (0{\%} stiction of DDMS SAM coated components). The obtained contact angle of the DDMS SAM coating was ~ 104°. Both long term stability and thermal stability of the DDMS SAM coatings were found to be good.",
    author = "Anna Rissanen and Kirsi Tappura and Mari Laamanen and Riikka Puurunen and E. F{\"a}rm and M. Ritala and M. Leskel{\"a}",
    note = "CO:K University of Helsinki CA2: TK610 CA2: TK609",
    year = "2010",
    doi = "10.1109/ICSENS.2010.5690769",
    language = "English",
    isbn = "978-142448168-2",
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    Rissanen, A, Tappura, K, Laamanen, M, Puurunen, R, Färm, E, Ritala, M & Leskelä, M 2010, Vapor-phase self-assembled monolayers for improved MEMS reliability. in Proceedings of IEEE Sensors 2010. IEEE Institute of Electrical and Electronic Engineers , pp. 767-770, 9th IEEE Sensors Conference SENSORS 2010, Kona, United States, 1/11/10. https://doi.org/10.1109/ICSENS.2010.5690769

    Vapor-phase self-assembled monolayers for improved MEMS reliability. / Rissanen, Anna; Tappura, Kirsi; Laamanen, Mari; Puurunen, Riikka; Färm, E.; Ritala, M.; Leskelä, M.

    Proceedings of IEEE Sensors 2010. IEEE Institute of Electrical and Electronic Engineers , 2010. p. 767-770.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    T1 - Vapor-phase self-assembled monolayers for improved MEMS reliability

    AU - Rissanen, Anna

    AU - Tappura, Kirsi

    AU - Laamanen, Mari

    AU - Puurunen, Riikka

    AU - Färm, E.

    AU - Ritala, M.

    AU - Leskelä, M.

    N1 - CO:K University of Helsinki CA2: TK610 CA2: TK609

    PY - 2010

    Y1 - 2010

    N2 - Download PDF Download Citation View References Email Request Permissions Export to Collabratec AlertsAbstract: This paper presents the application of vapor-phase DDMS (dichlorodimethylsilane) self-assembled monolayer (SAM) coating which significantly reduced stiction behavior in optical MEMS components exposed to humidity. Previously SAMs have been deposited in liquid form, making them unsuitable for application in high aspect ratio MEMS/NEMS structures; now vapor-phase SAM deposition is a novel option for improving MEMS in-use reliability. DDMS and ODS (noctadecyltrimethoxysilane) SAM coatings were tested on surfaces with different pre-treatments and the quality of coatings was assessed through static water contact angle measurements and humidity exposure tests for both test membrane structures (100% stiction on uncoated structures vs. 17% stiction of DDMS SAM coated structures) and optical MEMS FPI components (0% stiction of DDMS SAM coated components). The obtained contact angle of the DDMS SAM coating was ~ 104°. Both long term stability and thermal stability of the DDMS SAM coatings were found to be good.

    AB - Download PDF Download Citation View References Email Request Permissions Export to Collabratec AlertsAbstract: This paper presents the application of vapor-phase DDMS (dichlorodimethylsilane) self-assembled monolayer (SAM) coating which significantly reduced stiction behavior in optical MEMS components exposed to humidity. Previously SAMs have been deposited in liquid form, making them unsuitable for application in high aspect ratio MEMS/NEMS structures; now vapor-phase SAM deposition is a novel option for improving MEMS in-use reliability. DDMS and ODS (noctadecyltrimethoxysilane) SAM coatings were tested on surfaces with different pre-treatments and the quality of coatings was assessed through static water contact angle measurements and humidity exposure tests for both test membrane structures (100% stiction on uncoated structures vs. 17% stiction of DDMS SAM coated structures) and optical MEMS FPI components (0% stiction of DDMS SAM coated components). The obtained contact angle of the DDMS SAM coating was ~ 104°. Both long term stability and thermal stability of the DDMS SAM coatings were found to be good.

    U2 - 10.1109/ICSENS.2010.5690769

    DO - 10.1109/ICSENS.2010.5690769

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    BT - Proceedings of IEEE Sensors 2010

    PB - IEEE Institute of Electrical and Electronic Engineers

    ER -

    Rissanen A, Tappura K, Laamanen M, Puurunen R, Färm E, Ritala M et al. Vapor-phase self-assembled monolayers for improved MEMS reliability. In Proceedings of IEEE Sensors 2010. IEEE Institute of Electrical and Electronic Engineers . 2010. p. 767-770 https://doi.org/10.1109/ICSENS.2010.5690769