Vapor-phase self-assembled monolayers for improved MEMS reliability
- Anna Rissanen
- , Kirsi Tappura
- , Mari Laamanen
- , Riikka Puurunen
- , E. Färm
- , M. Ritala
- , M. Leskelä
- University of Helsinki
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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