Very high-q mickromechanical 14 MHz resonator on soi

M. Koskenvuori; T. Lamminmäki; P. Rantakari; I Tittonen; T. Mattila; A. Oja; H. Seppä; Hannu Kattelus; Jyrki Kiihamäki

Very high-q mickromechanical 14 MHz resonator on soi

M. Koskenvuori, T. Lamminmäki, P. Rantakari, I Tittonen, T. Mattila, A. Oja, H. Seppä, Hannu Kattelus, Jyrki Kiihamäki

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
Subtitle of host publication	Espoo, FI , 10 - 12 June 2002
Place of Publication	London, UK
Publisher	IOM Communications Ltd.
Pages	129-132
ISBN (Print)	1-86125-155-6
Publication status	Published - 2002
MoE publication type	A4 Article in a conference publication
Event	4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002 - Espoo, Finland Duration: 10 Jun 2002 → 12 Jun 2002

Conference

Conference	4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
Country/Territory	Finland
City	Espoo
Period	10/06/02 → 12/06/02

Cite this

Koskenvuori, M., Lamminmäki, T., Rantakari, P., Tittonen, I., Mattila, T., Oja, A., Seppä, H., Kattelus, H., & Kiihamäki, J. (2002). Very high-q mickromechanical 14 MHz resonator on soi. In Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002 (pp. 129-132). IOM Communications Ltd..

@inproceedings{0781081c103846c7938de850a3476ebf,

title = "Very high-q mickromechanical 14 MHz resonator on soi",

author = "M. Koskenvuori and T. Lamminm{\"a}ki and P. Rantakari and I Tittonen and T. Mattila and A. Oja and H. Sepp{\"a} and Hannu Kattelus and Jyrki Kiiham{\"a}ki",

year = "2002",

language = "English",

isbn = "1-86125-155-6",

pages = "129--132",

booktitle = "Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002",

publisher = "IOM Communications Ltd.",

address = "United Kingdom",

note = "4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002 ; Conference date: 10-06-2002 Through 12-06-2002",

}

Koskenvuori, M, Lamminmäki, T, Rantakari, P, Tittonen, I, Mattila, T, Oja, A, Seppä, H, Kattelus, H & Kiihamäki, J 2002, Very high-q mickromechanical 14 MHz resonator on soi. in Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. IOM Communications Ltd., London, UK, pp. 129-132, 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002, Espoo, Finland, 10/06/02.

Very high-q mickromechanical 14 MHz resonator on soi. / Koskenvuori, M.; Lamminmäki, T.; Rantakari, P. et al.
Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. London, UK: IOM Communications Ltd., 2002. p. 129-132.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Very high-q mickromechanical 14 MHz resonator on soi

AU - Koskenvuori, M.

AU - Lamminmäki, T.

AU - Rantakari, P.

AU - Tittonen, I

AU - Mattila, T.

AU - Oja, A.

AU - Seppä, H.

AU - Kattelus, Hannu

AU - Kiihamäki, Jyrki

PY - 2002

Y1 - 2002

M3 - Conference article in proceedings

SN - 1-86125-155-6

SP - 129

EP - 132

BT - Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002

PB - IOM Communications Ltd.

CY - London, UK

T2 - 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002

Y2 - 10 June 2002 through 12 June 2002

ER -