Very high-q mickromechanical 14 MHz resonator on soi

M. Koskenvuori, T. Lamminmäki, P. Rantakari, I Tittonen, T. Mattila, A. Oja, H. Seppä, Hannu Kattelus, Jyrki Kiihamäki

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationConference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
Subtitle of host publicationEspoo, FI , 10 - 12 June 2002
Place of PublicationLondon, UK
PublisherIOM Communications Ltd.
Pages129-132
ISBN (Print)1-86125-155-6
Publication statusPublished - 2002
MoE publication typeA4 Article in a conference publication
Event4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002 - Espoo, Finland
Duration: 10 Jun 200212 Jun 2002

Conference

Conference4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
CountryFinland
CityEspoo
Period10/06/0212/06/02

Cite this

Koskenvuori, M., Lamminmäki, T., Rantakari, P., Tittonen, I., Mattila, T., Oja, A., Seppä, H., Kattelus, H., & Kiihamäki, J. (2002). Very high-q mickromechanical 14 MHz resonator on soi. In Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002 (pp. 129-132). IOM Communications Ltd..