Virtual Project on the History of ALD

Overview and current status

Riikka, L. Puurunen, Yury Koshtyal, Henrik Pedersen, Ruud J. van Ommen, Jonas Sundqvist

Research output: Contribution to conferenceConference AbstractScientific

Original languageEnglish
Publication statusPublished - 2015
Event13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015 - Tartu, Estonia
Duration: 28 Sep 201529 Sep 2015

Conference

Conference13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015
Abbreviated titleBaltic ALD 2015
CountryEstonia
CityTartu
Period28/09/1529/09/15

Cite this

Puurunen, R. L., Koshtyal, Y., Pedersen, H., van Ommen, R. J., & Sundqvist, J. (2015). Virtual Project on the History of ALD: Overview and current status. Abstract from 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Tartu, Estonia.
Puurunen, Riikka, L. ; Koshtyal, Yury ; Pedersen, Henrik ; van Ommen, Ruud J. ; Sundqvist, Jonas. / Virtual Project on the History of ALD : Overview and current status. Abstract from 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Tartu, Estonia.
@conference{a8e81bcc4dd24fcf9255a705e8963876,
title = "Virtual Project on the History of ALD: Overview and current status",
author = "Puurunen, {Riikka, L.} and Yury Koshtyal and Henrik Pedersen and {van Ommen}, {Ruud J.} and Jonas Sundqvist",
note = "HUO: poster Project code: 102086 ; 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Baltic ALD 2015 ; Conference date: 28-09-2015 Through 29-09-2015",
year = "2015",
language = "English",

}

Puurunen, RL, Koshtyal, Y, Pedersen, H, van Ommen, RJ & Sundqvist, J 2015, 'Virtual Project on the History of ALD: Overview and current status' 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Tartu, Estonia, 28/09/15 - 29/09/15, .

Virtual Project on the History of ALD : Overview and current status. / Puurunen, Riikka, L.; Koshtyal, Yury; Pedersen, Henrik; van Ommen, Ruud J.; Sundqvist, Jonas.

2015. Abstract from 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Tartu, Estonia.

Research output: Contribution to conferenceConference AbstractScientific

TY - CONF

T1 - Virtual Project on the History of ALD

T2 - Overview and current status

AU - Puurunen, Riikka, L.

AU - Koshtyal, Yury

AU - Pedersen, Henrik

AU - van Ommen, Ruud J.

AU - Sundqvist, Jonas

N1 - HUO: poster Project code: 102086

PY - 2015

Y1 - 2015

UR - http://vph-ald.com/VPHApublications/VPHA_BALD2015_poster_FINAL_2015-09-22.pdf

M3 - Conference Abstract

ER -

Puurunen RL, Koshtyal Y, Pedersen H, van Ommen RJ, Sundqvist J. Virtual Project on the History of ALD: Overview and current status. 2015. Abstract from 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Tartu, Estonia.