Virtual Project on the History of ALD: Overview and current status

Riikka, L. Puurunen, Yury Koshtyal, Henrik Pedersen, Ruud J. van Ommen, Jonas Sundqvist

Research output: Contribution to conferenceConference AbstractScientific

Original languageEnglish
Publication statusPublished - 2015
Event13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015 - Tartu, Estonia
Duration: 28 Sep 201529 Sep 2015

Conference

Conference13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015
Abbreviated titleBaltic ALD 2015
CountryEstonia
CityTartu
Period28/09/1529/09/15

Cite this

Puurunen, R. L., Koshtyal, Y., Pedersen, H., van Ommen, R. J., & Sundqvist, J. (2015). Virtual Project on the History of ALD: Overview and current status. Abstract from 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Tartu, Estonia. http://vph-ald.com/VPHApublications/VPHA_BALD2015_FINAL.pdf