Virtual Project on the History of ALD: Overview and current status

Riikka, L. Puurunen; Yury Koshtyal; Henrik Pedersen; Ruud J. van Ommen; Jonas Sundqvist

Virtual Project on the History of ALD: Overview and current status

Riikka, L. Puurunen
, Yury Koshtyal
, Henrik Pedersen
, Ruud J. van Ommen
, Jonas Sundqvist

VTT Technical Research Centre of Finland

Ioffe Institute
University of Linköping
Delft University of Technology
Lund University

Research output: Contribution to conference › Conference Abstract › Scientific

Original language	English
Publication status	Published - 2015
Event	13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015 - Tartu, Estonia Duration: 28 Sept 2015 → 29 Sept 2015

Conference

Conference	13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015
Abbreviated title	Baltic ALD 2015
Country/Territory	Estonia
City	Tartu
Period	28/09/15 → 29/09/15

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http://vph-ald.com/VPHApublications/VPHA_BALD2015_FINAL.pdf

Cite this

@conference{a8e81bcc4dd24fcf9255a705e8963876,

title = "Virtual Project on the History of ALD: Overview and current status",

author = "Puurunen, \{Riikka, L.\} and Yury Koshtyal and Henrik Pedersen and \{van Ommen\}, \{Ruud J.\} and Jonas Sundqvist",

note = "HUO: poster Project code: 102086 ; 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Baltic ALD 2015 ; Conference date: 28-09-2015 Through 29-09-2015",

year = "2015",

language = "English",

}

TY - CONF

T1 - Virtual Project on the History of ALD

T2 - 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015

AU - Puurunen, Riikka, L.

AU - Koshtyal, Yury

AU - Pedersen, Henrik

AU - van Ommen, Ruud J.

AU - Sundqvist, Jonas

N1 - HUO: poster Project code: 102086

PY - 2015

Y1 - 2015

UR - http://vph-ald.com/VPHApublications/VPHA_BALD2015_poster_FINAL_2015-09-22.pdf

M3 - Conference Abstract

Y2 - 28 September 2015 through 29 September 2015

ER -

Virtual Project on the History of ALD: Overview and current status

Conference

Access to Document

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Cite this