VTT's silicon processing in new clean rooms by the end of 1990's

Tapio Wiik, Hannu Ronkainen

    Research output: Contribution to conference › Conference article › Scientific

    Original languageEnglish
    Pages223-321
    Publication statusPublished - 1994
    MoE publication typeNot Eligible
    Event25th R3-Nordic Conference - Oslo, Norway
    Duration: 9 May 1994 → 11 May 1994

    Conference

    Conference25th R3-Nordic Conference
    Country/TerritoryNorway
    CityOslo
    Period9/05/94 → 11/05/94

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