W-band RF-MEMS dicke switch networks in a GaAs MMIC process

Shakila Bint Reyaz (Corresponding Author), Carl Samuelsson, Robert Malmqvist, Seonho Seok, Michel Fryziel, Paul-Allain Rolland, B. Grandchamp, Pekka Rantakari, Tauno Vähä-Heikkilä

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)


    A novel design of a W‐band RF‐microelectro‐mechanical‐system (RF‐MEMS) Dicke switch network realized in a GaAs monolithic microwave integrated circuit process is presented in this article (including a BenzoCycloButene cap type of 0‐level package used as protection during wafer dicing). Such fabricated GaAs MEMS Dicke switch circuits show transmission losses of 1.3–1.7 dB (uncapped on‐wafer), 1.6–2.0 dB (uncapped chips), and 1.8–2.7 dB (0‐level packaged chips) at 70–96 GHz. Corresponding measured maximum values of switch isolation equal 23, 26, and 27 dB, respectively. To the authors' knowledge, these are the first reported uncapped and wafer‐level packaged W‐band low loss/DC power and high isolation/linearity RF‐MEMS Dicke switch circuits made in a GaAs foundry process.
    Original languageEnglish
    Pages (from-to)2849-2853
    JournalMicrowave and Optical Technology Letters
    Issue number12
    Publication statusPublished - 2013
    MoE publication typeA1 Journal article-refereed


    • Dicke switch network
    • Gallium Arsenide
    • monolithic microwave integrated circuit
    • radio frequency microelectro-mechanical-systems


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