Wafer level MEMS encapsulation using SLID bonding

Tommi Suni, H Xu, Hannele Heikkinen, James Dekker, V Vuorinen, Antti Jaakkola, Philippe Monnoyer, M Paulasto-Kröckel

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

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Physics & Astronomy