Abstract
| Original language | English |
|---|---|
| Title of host publication | Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on |
| Publisher | IEEE Institute of Electrical and Electronic Engineers |
| Pages | 1-6 |
| ISBN (Electronic) | 978-1-4799-8625-5 |
| ISBN (Print) | 978-1-4799-8627-9 |
| DOIs | |
| Publication status | Published - 20 Jul 2015 |
| MoE publication type | A4 Article in a conference publication |
| Event | 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 - Montpellier, France Duration: 27 Apr 2015 → 30 Apr 2015 Conference number: 17 |
Other
| Other | 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 |
|---|---|
| Abbreviated title | DTIP 2015 |
| Country | France |
| City | Montpellier |
| Period | 27/04/15 → 30/04/15 |
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Keywords
- Au/Sn
- interposer
- MEMS resonator
- sealing
- TSV
- vacuum
- WLP
Cite this
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Wafer level packaging for hermetical encapsulation of MEMS resonators. / Manier, C.-A.; Zoschke, K.; Oppermann, H.; Ruffieux, D.; Dalla Piazza, Silvio; Suni, Tommi; Dekker, J.; Allegato, G.
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on. IEEE Institute of Electrical and Electronic Engineers , 2015. p. 1-6.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - Wafer level packaging for hermetical encapsulation of MEMS resonators
AU - Manier, C.-A.
AU - Zoschke, K.
AU - Oppermann, H.
AU - Ruffieux, D.
AU - Dalla Piazza, Silvio
AU - Suni, Tommi
AU - Dekker, J.
AU - Allegato, G.
PY - 2015/7/20
Y1 - 2015/7/20
N2 - This paper will present wafer level packaging approaches and results for MEMS encapsulation and integration applied to resonators. The core technologies involve interposer fabrication with Through-Silicon Vias (TSV), temporary wafer bonding for thin wafer handling and wafer bonding for metallic sealing under vacuum and for formation of electrical interconnects. Seal rings based on AuSn metallurgy have been considered for process compatibility with MEMS and provide the hermetical sealing of the components after vacuum encapsulation. Different packaging processes were tested and are here succinctly presented for established quartz crystals as well as for emerging Silicon Resonators (SiRes). First investigations on if, and possibly how, wafer dicing affects the packaged components were performed. A yield of 80% could be achieved in wafer level packaging of quartz crystal resonators at 8" wafer scale first step towards an ongoing 3D integration with CMOS. © 2015 IEEE.
AB - This paper will present wafer level packaging approaches and results for MEMS encapsulation and integration applied to resonators. The core technologies involve interposer fabrication with Through-Silicon Vias (TSV), temporary wafer bonding for thin wafer handling and wafer bonding for metallic sealing under vacuum and for formation of electrical interconnects. Seal rings based on AuSn metallurgy have been considered for process compatibility with MEMS and provide the hermetical sealing of the components after vacuum encapsulation. Different packaging processes were tested and are here succinctly presented for established quartz crystals as well as for emerging Silicon Resonators (SiRes). First investigations on if, and possibly how, wafer dicing affects the packaged components were performed. A yield of 80% could be achieved in wafer level packaging of quartz crystal resonators at 8" wafer scale first step towards an ongoing 3D integration with CMOS. © 2015 IEEE.
KW - Au/Sn
KW - interposer
KW - MEMS resonator
KW - sealing
KW - TSV
KW - vacuum
KW - WLP
U2 - 10.1109/DTIP.2015.7161027
DO - 10.1109/DTIP.2015.7161027
M3 - Conference article in proceedings
SN - 978-1-4799-8627-9
SP - 1
EP - 6
BT - Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on
PB - IEEE Institute of Electrical and Electronic Engineers
ER -