Wafer scale encapsulation of MEMS by direct bonding

Tommi Suni, Kimmo Henttinen, James Dekker, Hannu Luoto, Martin Kulawski, Hannu Kattelus

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Abstract

    We have developed methods for wafer level MEMS encapsulation by using low temperature direct bonding. Such packaging method is fast, provides a hermetic seal, does not require intermediate layers such as metals or adhesives and is IC-compatible. Strong bonding between the cap wafer and the device wafer can be obtained at temperatures below 200°C, which is than required in anodic bonding, and in direct bonding no high voltage is required. However, the problem in the direct bonding is that the surfaces to be bonded should be extremely clean and flat for spontaneous bonding to occur. For this purpose we have studied different methods for surface planarization and smoothing as well as for surface protection.
    Original languageEnglish
    Title of host publication16th Micromechanics Europe Workshop
    Subtitle of host publicationBook of abstracts
    Place of PublicationGöteborg
    Pages119-122
    Publication statusPublished - 2005
    Event16th Micromechanics Europe Workshop, MME05 - Göteborg, Sweden
    Duration: 4 Sep 20056 Sep 2005

    Conference

    Conference16th Micromechanics Europe Workshop, MME05
    Country/TerritorySweden
    CityGöteborg
    Period4/09/056/09/05

    Keywords

    • MEMS
    • wafer scale packaging
    • wafer bonding

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