Abstract
The authors demonstrate a highly sensitive chemical sensor scheme based on Si/sub 3/N/sub 4/ channel waveguides, species-selective surface coatings and Zeeman interferometry. The relative phase change between the TE and TM modes under exposure to toluene vapour is measured. The measurements demonstrate the real-time and reversible response with good sensitivity at low concentrations.
Original language | English |
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Pages (from-to) | 1651-1653 |
Journal | Electronics Letters |
Volume | 33 |
Issue number | 19 |
DOIs | |
Publication status | Published - 1997 |
MoE publication type | A1 Journal article-refereed |