TY - GEN
T1 - Wavelength Scanning Interferometry for Topography of Microchannels at Roll-to-Roll Line with Optical Coherence Tomography
AU - Lauri, Janne
AU - Liedert, Christina
AU - Fabritius, Tapio
N1 - Funding Information:
J.L is partially supported by European Regional Development Fund (project: PrintoCent10, no. A73286 and PrintoDiSe, no. A76026). T.F is partially supported by Academy of Finland’s FIRI funding (grant no. 320017).
Publisher Copyright:
© 2021 IEEE.
PY - 2021/5/17
Y1 - 2021/5/17
N2 - Roll-to-roll (R2R) process is mass manufacturing method that can produce various products ranging from printed electronics to microfluidics. Microfluidics, used in biosensors, demands high tolerances and quality to guarantee correct functionality of sensors. In this work, optical coherence tomography device was installed at the R2R-line to measure the height and width of the hot embossed microchannel structures at speed of 1m/min. The repeating channel structure on the 10 m long sample web was measured at 1m interval. An algorithm, typically used in wavelength scanning interferometry (WSI), is utilized to recover topography at nanometer scale. The results showed that the R2R hot embossing process was very stable and predictable. If process parameters, for instance pressure at the hot embossing unit was increased, it resulted deeper channels as expected. The OCT, with the WSI algorithm, provides topography of microchannel at nanometer scale being thus an excellent tool for optimization of process parameters and for on-line quality control.
AB - Roll-to-roll (R2R) process is mass manufacturing method that can produce various products ranging from printed electronics to microfluidics. Microfluidics, used in biosensors, demands high tolerances and quality to guarantee correct functionality of sensors. In this work, optical coherence tomography device was installed at the R2R-line to measure the height and width of the hot embossed microchannel structures at speed of 1m/min. The repeating channel structure on the 10 m long sample web was measured at 1m interval. An algorithm, typically used in wavelength scanning interferometry (WSI), is utilized to recover topography at nanometer scale. The results showed that the R2R hot embossing process was very stable and predictable. If process parameters, for instance pressure at the hot embossing unit was increased, it resulted deeper channels as expected. The OCT, with the WSI algorithm, provides topography of microchannel at nanometer scale being thus an excellent tool for optimization of process parameters and for on-line quality control.
KW - nondestructive testing
KW - online measurement
KW - profilometer
KW - wavelength scanning interferometry
UR - http://www.scopus.com/inward/record.url?scp=85113711222&partnerID=8YFLogxK
U2 - 10.1109/I2MTC50364.2021.9460091
DO - 10.1109/I2MTC50364.2021.9460091
M3 - Conference article in proceedings
AN - SCOPUS:85113711222
SN - 978-1-7281-9540-7
T3 - IEEE International Instrumentation and Measurement Technology Conference
BT - 2021 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)
PB - IEEE Institute of Electrical and Electronic Engineers
T2 - IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2021
Y2 - 17 May 2021 through 20 May 2021
ER -