Wavelength Scanning Interferometry for Topography of Microchannels at Roll-to-Roll Line with Optical Coherence Tomography

Janne Lauri, Christina Liedert, Tapio Fabritius

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    Roll-to-roll (R2R) process is mass manufacturing method that can produce various products ranging from printed electronics to microfluidics. Microfluidics, used in biosensors, demands high tolerances and quality to guarantee correct functionality of sensors. In this work, optical coherence tomography device was installed at the R2R-line to measure the height and width of the hot embossed microchannel structures at speed of 1m/min. The repeating channel structure on the 10 m long sample web was measured at 1m interval. An algorithm, typically used in wavelength scanning interferometry (WSI), is utilized to recover topography at nanometer scale. The results showed that the R2R hot embossing process was very stable and predictable. If process parameters, for instance pressure at the hot embossing unit was increased, it resulted deeper channels as expected. The OCT, with the WSI algorithm, provides topography of microchannel at nanometer scale being thus an excellent tool for optimization of process parameters and for on-line quality control.

    Original languageEnglish
    Title of host publicationI2MTC 2021 - IEEE International Instrumentation and Measurement Technology Conference, Proceedings
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)9781728195391
    DOIs
    Publication statusPublished - 17 May 2021
    MoE publication typeA4 Article in a conference publication
    EventIEEE International Instrumentation and Measurement Technology Conference, I2MTC 2021: Online - Virtual, Glasgow, United Kingdom
    Duration: 17 May 202120 May 2021

    Publication series

    SeriesConference Record - IEEE Instrumentation and Measurement Technology Conference
    Volume2021-May
    ISSN1091-5281

    Conference

    ConferenceIEEE International Instrumentation and Measurement Technology Conference, I2MTC 2021
    Abbreviated titleI2MTC 2021
    Country/TerritoryUnited Kingdom
    CityGlasgow
    Period17/05/2120/05/21

    Keywords

    • nondestructive testing
    • online measurement
    • profilometer
    • wavelength scanning interferometry

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