Wide-band acoustically coupled thin-film BAW filter

Johanna Meltaus (Inventor), Tuomas Pensala (Inventor)

Research output: PatentPatent


In a bulk acoustic wave (BAW) filter based on laterally acoustically coupled resonators on piezoelectric thin films, one can utilize two distinct acoustic plate wave modes of different nature, for example the thickness extensional (longitudinal) TE1 and the second harmonic thickness shear (TS2) mode to form a bandpass response. The invention is based on the excitation of at least two lateral standing wave resonances belonging to different plate wave modes that facilitate the transmission of signal. The passband is designed by tailoring the wave propagation characteristics in the device such that the resonances are excited at suitable frequencies to form a passband of a desired shape. The bandwidth of the filter described herein may therefore be more than twice that of the existing state-of-the-art microacoustic filters. Consequently, it has significant commercial and technological value.

Patent family as of 21.9.2021
CN102870325 A 20130109 CN201180020563 20110421      
CN102870325 B 20150909 CN201180020563 20110421      
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EP2561613 A1 20130227 EP20110771646 20110421      
EP2561613 A4 20131127 EP20110771646 20110421      
EP2561613 B1 20160113 EP20110771646 20110421      
FI123640 B 20130830 FI20100005443 20100423      
FI20105443 A 20130617 FI20100005443 20100423      
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JP2013528996 T2 20130711 JP20130505511T 20110421      
JP5709226 B2 20150430 JP20130505511T 20110421      
KR101764787 B1 20170803 KR20127030465 20110421      
KR20130091658 A 20130819 KR20127030465 20110421      
US2013057360 AA 20130307 US20110642155 20110421      
US9294069 BB 20160322 US20110642155 20110421      
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WO11131844 A1 20111027 WO2011FI50368 20110421

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Original languageEnglish
Patent numberEP2561613
IPCH03H 9/ 00 A N
Priority date21/04/11
Publication statusPublished - 27 Feb 2013
MoE publication typeH1 Granted patent


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