Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Abstract

Small, tunable MEMS Fabry-Perot interferometer (FPIs) have recently been demonstrated to enable hyperspectral imaging in mobile devices, so far using Bragg reflector mirror technologies, which however limit the device tuning range. This paper presents the realization of a novel MEMS FPI structure based on Ag thin film mirrors (AgMFPI), which allows tuning the entire visible - very near infrared (VNIR) wavelength range (for example 450 - 900 nm) with one single component. The characterized transmission of the components is 12 - 45% with full-width-half-maximum values (FWHM) between 11 - 18 nm using 2 mm optical aperture, while using 3 mm optical aperture results in FWHM values of 12 - 20 nm. A very compact hyperspectral imager can thus be built to cover this spectra by combining this AgMFPI and a typical RGB type of image sensor.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XVII
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Electronic)978-1-5106-1575-5
DOIs
Publication statusPublished - 1 Jan 2018
MoE publication typeA4 Article in a conference publication
EventMOEMS and Miniaturized Systems XVII 2018 - San Francisco, United States
Duration: 30 Jan 201831 Jan 2018

Publication series

SeriesProceedings of SPIE
Volume10545

Conference

ConferenceMOEMS and Miniaturized Systems XVII 2018
CountryUnited States
CitySan Francisco
Period30/01/1831/01/18

Fingerprint

Fabry-Perot Interferometer
Fabry-Perot interferometers
Hyperspectral Imaging
Micro-electro-mechanical Systems
microelectromechanical systems
MEMS
apertures
broadband
Image sensors
Tuning
Mirror
tuning
mirrors
Bragg reflectors
Image Sensor
Reflector
Imager
Mobile devices
Mobile Devices
Range of data

Keywords

  • hyperspectral imaging
  • MEMS Fabry-Perot interferometer
  • mobile device
  • MOEMS
  • wide-band

Cite this

Guo, B., Antti, N., Roberts, T., Havia, T., Stuns, I., Saari, H., & Rissanen, A. (2018). Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging. In MOEMS and Miniaturized Systems XVII [105450U] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 10545 https://doi.org/10.1117/12.2286438
Guo, Bin ; Antti, Näsilä ; Roberts, Trops ; Havia, Tahvo ; Stuns, Ingmar ; Saari, Heikki ; Rissanen, Anna. / Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging. MOEMS and Miniaturized Systems XVII. International Society for Optics and Photonics SPIE, 2018. (Proceedings of SPIE, Vol. 10545).
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abstract = "Small, tunable MEMS Fabry-Perot interferometer (FPIs) have recently been demonstrated to enable hyperspectral imaging in mobile devices, so far using Bragg reflector mirror technologies, which however limit the device tuning range. This paper presents the realization of a novel MEMS FPI structure based on Ag thin film mirrors (AgMFPI), which allows tuning the entire visible - very near infrared (VNIR) wavelength range (for example 450 - 900 nm) with one single component. The characterized transmission of the components is 12 - 45{\%} with full-width-half-maximum values (FWHM) between 11 - 18 nm using 2 mm optical aperture, while using 3 mm optical aperture results in FWHM values of 12 - 20 nm. A very compact hyperspectral imager can thus be built to cover this spectra by combining this AgMFPI and a typical RGB type of image sensor.",
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Guo, B, Antti, N, Roberts, T, Havia, T, Stuns, I, Saari, H & Rissanen, A 2018, Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging. in MOEMS and Miniaturized Systems XVII., 105450U, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 10545, MOEMS and Miniaturized Systems XVII 2018, San Francisco, United States, 30/01/18. https://doi.org/10.1117/12.2286438

Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging. / Guo, Bin; Antti, Näsilä; Roberts, Trops; Havia, Tahvo; Stuns, Ingmar; Saari, Heikki; Rissanen, Anna.

MOEMS and Miniaturized Systems XVII. International Society for Optics and Photonics SPIE, 2018. 105450U (Proceedings of SPIE, Vol. 10545).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Guo B, Antti N, Roberts T, Havia T, Stuns I, Saari H et al. Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging. In MOEMS and Miniaturized Systems XVII. International Society for Optics and Photonics SPIE. 2018. 105450U. (Proceedings of SPIE, Vol. 10545). https://doi.org/10.1117/12.2286438