Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging

Bin Guo, Näsilä Antti, Trops Roberts, Tahvo Havia, Ingmar Stuns, Heikki Saari, Anna Rissanen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    6 Citations (Scopus)


    Small, tunable MEMS Fabry-Perot interferometer (FPIs) have recently been demonstrated to enable hyperspectral imaging in mobile devices, so far using Bragg reflector mirror technologies, which however limit the device tuning range. This paper presents the realization of a novel MEMS FPI structure based on Ag thin film mirrors (AgMFPI), which allows tuning the entire visible - very near infrared (VNIR) wavelength range (for example 450 - 900 nm) with one single component. The characterized transmission of the components is 12 - 45% with full-width-half-maximum values (FWHM) between 11 - 18 nm using 2 mm optical aperture, while using 3 mm optical aperture results in FWHM values of 12 - 20 nm. A very compact hyperspectral imager can thus be built to cover this spectra by combining this AgMFPI and a typical RGB type of image sensor.

    Original languageEnglish
    Title of host publicationMOEMS and Miniaturized Systems XVII
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Electronic)978-1-5106-1575-5
    Publication statusPublished - 1 Jan 2018
    MoE publication typeA4 Article in a conference publication
    EventMOEMS and Miniaturized Systems XVII 2018 - San Francisco, United States
    Duration: 30 Jan 201831 Jan 2018

    Publication series

    SeriesProceedings of SPIE


    ConferenceMOEMS and Miniaturized Systems XVII 2018
    Country/TerritoryUnited States
    CitySan Francisco


    • hyperspectral imaging
    • MEMS Fabry-Perot interferometer
    • mobile device
    • MOEMS
    • wide-band
    • OtaNano


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