Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)

    Abstract

    Small, tunable MEMS Fabry-Perot interferometer (FPIs) have recently been demonstrated to enable hyperspectral imaging in mobile devices, so far using Bragg reflector mirror technologies, which however limit the device tuning range. This paper presents the realization of a novel MEMS FPI structure based on Ag thin film mirrors (AgMFPI), which allows tuning the entire visible - very near infrared (VNIR) wavelength range (for example 450 - 900 nm) with one single component. The characterized transmission of the components is 12 - 45% with full-width-half-maximum values (FWHM) between 11 - 18 nm using 2 mm optical aperture, while using 3 mm optical aperture results in FWHM values of 12 - 20 nm. A very compact hyperspectral imager can thus be built to cover this spectra by combining this AgMFPI and a typical RGB type of image sensor.

    Original languageEnglish
    Title of host publicationMOEMS and Miniaturized Systems XVII
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Electronic)978-1-5106-1575-5
    DOIs
    Publication statusPublished - 1 Jan 2018
    MoE publication typeA4 Article in a conference publication
    EventMOEMS and Miniaturized Systems XVII 2018 - San Francisco, United States
    Duration: 30 Jan 201831 Jan 2018

    Publication series

    SeriesProceedings of SPIE
    Volume10545

    Conference

    ConferenceMOEMS and Miniaturized Systems XVII 2018
    CountryUnited States
    CitySan Francisco
    Period30/01/1831/01/18

    Fingerprint

    Fabry-Perot Interferometer
    Fabry-Perot interferometers
    Hyperspectral Imaging
    Micro-electro-mechanical Systems
    microelectromechanical systems
    MEMS
    apertures
    broadband
    Image sensors
    Tuning
    Mirror
    tuning
    mirrors
    Bragg reflectors
    Image Sensor
    Reflector
    Imager
    Mobile devices
    Mobile Devices
    Range of data

    Keywords

    • hyperspectral imaging
    • MEMS Fabry-Perot interferometer
    • mobile device
    • MOEMS
    • wide-band

    Cite this

    Guo, B., Antti, N., Roberts, T., Havia, T., Stuns, I., Saari, H., & Rissanen, A. (2018). Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging. In MOEMS and Miniaturized Systems XVII [105450U] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 10545 https://doi.org/10.1117/12.2286438
    Guo, Bin ; Antti, Näsilä ; Roberts, Trops ; Havia, Tahvo ; Stuns, Ingmar ; Saari, Heikki ; Rissanen, Anna. / Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging. MOEMS and Miniaturized Systems XVII. International Society for Optics and Photonics SPIE, 2018. (Proceedings of SPIE, Vol. 10545).
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    title = "Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging",
    abstract = "Small, tunable MEMS Fabry-Perot interferometer (FPIs) have recently been demonstrated to enable hyperspectral imaging in mobile devices, so far using Bragg reflector mirror technologies, which however limit the device tuning range. This paper presents the realization of a novel MEMS FPI structure based on Ag thin film mirrors (AgMFPI), which allows tuning the entire visible - very near infrared (VNIR) wavelength range (for example 450 - 900 nm) with one single component. The characterized transmission of the components is 12 - 45{\%} with full-width-half-maximum values (FWHM) between 11 - 18 nm using 2 mm optical aperture, while using 3 mm optical aperture results in FWHM values of 12 - 20 nm. A very compact hyperspectral imager can thus be built to cover this spectra by combining this AgMFPI and a typical RGB type of image sensor.",
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    author = "Bin Guo and N{\"a}sil{\"a} Antti and Trops Roberts and Tahvo Havia and Ingmar Stuns and Heikki Saari and Anna Rissanen",
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    Guo, B, Antti, N, Roberts, T, Havia, T, Stuns, I, Saari, H & Rissanen, A 2018, Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging. in MOEMS and Miniaturized Systems XVII., 105450U, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 10545, MOEMS and Miniaturized Systems XVII 2018, San Francisco, United States, 30/01/18. https://doi.org/10.1117/12.2286438

    Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging. / Guo, Bin; Antti, Näsilä; Roberts, Trops; Havia, Tahvo; Stuns, Ingmar; Saari, Heikki; Rissanen, Anna.

    MOEMS and Miniaturized Systems XVII. International Society for Optics and Photonics SPIE, 2018. 105450U (Proceedings of SPIE, Vol. 10545).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    Guo B, Antti N, Roberts T, Havia T, Stuns I, Saari H et al. Wide-band large-aperture Ag surface-micro-machined MEMS Fabry-Perot interferometers (AgMFPIs) for miniaturized hyperspectral imaging. In MOEMS and Miniaturized Systems XVII. International Society for Optics and Photonics SPIE. 2018. 105450U. (Proceedings of SPIE, Vol. 10545). https://doi.org/10.1117/12.2286438