Wideband microwave power sensor based on MEMS technology

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Abstract

An optimized transmission-type MEMS RF power sensor is presented. The design is based on microwave filter theory. It is shown that the thermal resolution of the sensor can be reduced below -50 dBm for RF bandwidths up to f ≤ 40 GHz.
Original languageEnglish
Title of host publication2004 Conference on Precision Electromagnetic Measurements Digest
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages115-116
ISBN (Electronic)0-7803-8494-6
ISBN (Print)0-7803-8493-8
DOIs
Publication statusPublished - 2004
MoE publication typeA4 Article in a conference publication
Event2004 Conference on Precision Electromagnetic Measurements, CPEM 2004 - London, United Kingdom
Duration: 27 Jun 20042 Jul 2004

Conference

Conference2004 Conference on Precision Electromagnetic Measurements, CPEM 2004
CountryUnited Kingdom
CityLondon
Period27/06/042/07/04

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  • Cite this

    Alastalo, A., Kyynäräinen, J., Seppä, H., Kärkkäinen, A., Pesonen, N., Lahdes, M., Vähä-Heikkilä, T., Pekko, P., & Dekker, J. (2004). Wideband microwave power sensor based on MEMS technology. In 2004 Conference on Precision Electromagnetic Measurements Digest (pp. 115-116). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/CPEM.2004.305487