Wideband microwave power sensor based on MEMS technology

Ari Alastalo; Jukka Kyynäräinen; Heikki Seppä; Anu Kärkkäinen; Nadine Pesonen; Manu Lahdes; Tauno Vähä-Heikkilä; Panu Pekko; James Dekker

doi:10.1109/CPEM.2004.305487

Wideband microwave power sensor based on MEMS technology

Ari Alastalo
, Jukka Kyynäräinen
, Heikki Seppä
, Anu Kärkkäinen
, Nadine Pesonen
, Manu Lahdes
, Tauno Vähä-Heikkilä
, Panu Pekko
, James Dekker

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

An optimized transmission-type MEMS RF power sensor is presented. The design is based on microwave filter theory. It is shown that the thermal resolution of the sensor can be reduced below -50 dBm for RF bandwidths up to f ≤ 40 GHz.

Original language	English
Title of host publication	2004 Conference on Precision Electromagnetic Measurements Digest
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	115-116
ISBN (Electronic)	978-0-7803-8494-1
ISBN (Print)	978-0-7803-8493-4
DOIs	https://doi.org/10.1109/CPEM.2004.305487
Publication status	Published - 2004
MoE publication type	A4 Article in a conference publication
Event	2004 Conference on Precision Electromagnetic Measurements, CPEM 2004 - London, United Kingdom Duration: 27 Jun 2004 → 2 Jul 2004

Conference

Conference	2004 Conference on Precision Electromagnetic Measurements, CPEM 2004
Country/Territory	United Kingdom
City	London
Period	27/06/04 → 2/07/04

Access to Document

10.1109/CPEM.2004.305487

Cite this

Alastalo, A., Kyynäräinen, J., Seppä, H., Kärkkäinen, A., Pesonen, N., Lahdes, M., Vähä-Heikkilä, T., Pekko, P., & Dekker, J. (2004). Wideband microwave power sensor based on MEMS technology. In 2004 Conference on Precision Electromagnetic Measurements Digest (pp. 115-116). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/CPEM.2004.305487

@inproceedings{7106ae5a04ba49f0a27c3f0b6350533c,

title = "Wideband microwave power sensor based on MEMS technology",

abstract = "An optimized transmission-type MEMS RF power sensor is presented. The design is based on microwave filter theory. It is shown that the thermal resolution of the sensor can be reduced below -50 dBm for RF bandwidths up to f ≤ 40 GHz.",

author = "Ari Alastalo and Jukka Kyyn{\"a}r{\"a}inen and Heikki Sepp{\"a} and Anu K{\"a}rkk{\"a}inen and Nadine Pesonen and Manu Lahdes and Tauno V{\"a}h{\"a}-Heikkil{\"a} and Panu Pekko and James Dekker",

year = "2004",

doi = "10.1109/CPEM.2004.305487",

language = "English",

isbn = "978-0-7803-8493-4",

pages = "115--116",

booktitle = "2004 Conference on Precision Electromagnetic Measurements Digest",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "2004 Conference on Precision Electromagnetic Measurements, CPEM 2004 ; Conference date: 27-06-2004 Through 02-07-2004",

}

Alastalo, A, Kyynäräinen, J, Seppä, H, Kärkkäinen, A, Pesonen, N, Lahdes, M , Vähä-Heikkilä, T , Pekko, P & Dekker, J 2004, Wideband microwave power sensor based on MEMS technology. in 2004 Conference on Precision Electromagnetic Measurements Digest. IEEE Institute of Electrical and Electronic Engineers, pp. 115-116, 2004 Conference on Precision Electromagnetic Measurements, CPEM 2004, London, United Kingdom, 27/06/04. https://doi.org/10.1109/CPEM.2004.305487

Wideband microwave power sensor based on MEMS technology. / Alastalo, Ari; Kyynäräinen, Jukka; Seppä, Heikki et al.
2004 Conference on Precision Electromagnetic Measurements Digest. IEEE Institute of Electrical and Electronic Engineers, 2004. p. 115-116.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Wideband microwave power sensor based on MEMS technology

AU - Alastalo, Ari

AU - Kyynäräinen, Jukka

AU - Seppä, Heikki

AU - Kärkkäinen, Anu

AU - Pesonen, Nadine

AU - Lahdes, Manu

AU - Vähä-Heikkilä, Tauno

AU - Pekko, Panu

AU - Dekker, James

PY - 2004

Y1 - 2004

N2 - An optimized transmission-type MEMS RF power sensor is presented. The design is based on microwave filter theory. It is shown that the thermal resolution of the sensor can be reduced below -50 dBm for RF bandwidths up to f ≤ 40 GHz.

AB - An optimized transmission-type MEMS RF power sensor is presented. The design is based on microwave filter theory. It is shown that the thermal resolution of the sensor can be reduced below -50 dBm for RF bandwidths up to f ≤ 40 GHz.

U2 - 10.1109/CPEM.2004.305487

DO - 10.1109/CPEM.2004.305487

M3 - Conference article in proceedings

SN - 978-0-7803-8493-4

SP - 115

EP - 116

BT - 2004 Conference on Precision Electromagnetic Measurements Digest

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 2004 Conference on Precision Electromagnetic Measurements, CPEM 2004

Y2 - 27 June 2004 through 2 July 2004

ER -

Wideband microwave power sensor based on MEMS technology

Abstract

Conference

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