Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm 3 , and scanning frequency of 1.6 kHz. A tilt angle of +/− 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 V pp .
Original languageEnglish
Title of host publication2019 IEEE International Ultrasonics Symposium, IUS 2019
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages1977-1980
Number of pages4
ISBN (Electronic)978-1-7281-4596-9, 978-1-7281-4595-2
ISBN (Print)978-1-7281-4597-6
DOIs
Publication statusPublished - Oct 2019
MoE publication typeA4 Article in a conference publication
Event2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
Duration: 6 Oct 20199 Oct 2019

Conference

Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
CountryUnited Kingdom
CityGlasgow
Period6/10/199/10/19

Keywords

  • Mirrors
  • Laser radar
  • Actuators
  • Micromechanical devices
  • Laser beams
  • Optical reflection
  • Springs
  • MEMS
  • LIDAR
  • AlN
  • SOI
  • automotive
  • OtaNano

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