Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    5 Citations (Scopus)

    Abstract

    Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm 3 , and scanning frequency of 1.6 kHz. A tilt angle of +/− 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 V pp .
    Original languageEnglish
    Title of host publication2019 IEEE International Ultrasonics Symposium, IUS 2019
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1977-1980
    Number of pages4
    ISBN (Electronic)978-1-7281-4596-9, 978-1-7281-4595-2
    ISBN (Print)978-1-7281-4597-6
    DOIs
    Publication statusPublished - Oct 2019
    MoE publication typeA4 Article in a conference publication
    Event2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
    Duration: 6 Oct 20199 Oct 2019

    Conference

    Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
    Country/TerritoryUnited Kingdom
    CityGlasgow
    Period6/10/199/10/19

    Keywords

    • Mirrors
    • Laser radar
    • Actuators
    • Micromechanical devices
    • Laser beams
    • Optical reflection
    • Springs
    • MEMS
    • LIDAR
    • AlN
    • SOI
    • automotive
    • OtaNano

    Fingerprint

    Dive into the research topics of 'Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications'. Together they form a unique fingerprint.

    Cite this