Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm 3 , and scanning frequency of 1.6 kHz. A tilt angle of +/− 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 V pp .
Original languageEnglish
Title of host publication2019 IEEE International Ultrasonics Symposium, IUS 2019
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages1977-1980
Number of pages4
ISBN (Electronic)978-1-7281-4596-9, 978-1-7281-4595-2
ISBN (Print)978-1-7281-4597-6
DOIs
Publication statusPublished - Oct 2019
MoE publication typeA4 Article in a conference publication
Event2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
Duration: 6 Oct 20199 Oct 2019

Conference

Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
CountryUnited Kingdom
CityGlasgow
Period6/10/199/10/19

Fingerprint

microelectromechanical systems
field of view
mirrors
frequency scanning
aluminum nitrides
apertures
chips
laser beams
scanning
electric potential

Keywords

  • Mirrors
  • Laser radar
  • Actuators
  • Micromechanical devices
  • Laser beams
  • Optical reflection
  • Springs
  • MEMS
  • LIDAR
  • AlN
  • SOI
  • automotive

Cite this

Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., ... Kiihamäki, J. (2019). Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications. In 2019 IEEE International Ultrasonics Symposium, IUS 2019 (pp. 1977-1980). [8925660] IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ULTSYM.2019.8925660
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title = "Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications",
abstract = "Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm 3 , and scanning frequency of 1.6 kHz. A tilt angle of +/− 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 V pp .",
keywords = "Mirrors, Laser radar, Actuators, Micromechanical devices, Laser beams, Optical reflection, Springs, MEMS, LIDAR, AlN, SOI, automotive",
author = "Tuomas Pensala and Jukka Kyyn{\"a}r{\"a}inen and Dekker, {James R.} and Sergey Gorelick and Panu Pekko and Tapio Pernu and Ylivaara, {Oili M.E.} and Feng Gao and Dmitry Morits and Jyrki Kiiham{\"a}ki",
year = "2019",
month = "10",
doi = "10.1109/ULTSYM.2019.8925660",
language = "English",
isbn = "978-1-7281-4597-6",
pages = "1977--1980",
booktitle = "2019 IEEE International Ultrasonics Symposium, IUS 2019",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
address = "United States",

}

Pensala, T, Kyynäräinen, J, Dekker, JR, Gorelick, S, Pekko, P, Pernu, T, Ylivaara, OME, Gao, F, Morits, D & Kiihamäki, J 2019, Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications. in 2019 IEEE International Ultrasonics Symposium, IUS 2019., 8925660, IEEE Institute of Electrical and Electronic Engineers , pp. 1977-1980, 2019 IEEE International Ultrasonics Symposium, IUS 2019, Glasgow, United Kingdom, 6/10/19. https://doi.org/10.1109/ULTSYM.2019.8925660

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications. / Pensala, Tuomas; Kyynäräinen, Jukka; Dekker, James R.; Gorelick, Sergey; Pekko, Panu; Pernu, Tapio; Ylivaara, Oili M.E.; Gao, Feng; Morits, Dmitry; Kiihamäki, Jyrki.

2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers , 2019. p. 1977-1980 8925660.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AU - Gorelick, Sergey

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AB - Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm 3 , and scanning frequency of 1.6 kHz. A tilt angle of +/− 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 V pp .

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KW - Laser radar

KW - Actuators

KW - Micromechanical devices

KW - Laser beams

KW - Optical reflection

KW - Springs

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KW - LIDAR

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Pensala T, Kyynäräinen J, Dekker JR, Gorelick S, Pekko P, Pernu T et al. Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications. In 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers . 2019. p. 1977-1980. 8925660 https://doi.org/10.1109/ULTSYM.2019.8925660