Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    17 Citations (Scopus)

    Abstract

    Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm³ , and scanning frequency of 1.6 kHz. A tilt angle of +/− 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 V pp .
    Original languageEnglish
    Title of host publication2019 IEEE International Ultrasonics Symposium, IUS 2019
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1977-1980
    ISBN (Electronic)978-1-7281-4596-9, 978-1-7281-4595-2
    ISBN (Print)978-1-7281-4597-6
    DOIs
    Publication statusPublished - Oct 2019
    MoE publication typeA4 Article in a conference publication
    Event2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
    Duration: 6 Oct 20199 Oct 2019

    Conference

    Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
    Country/TerritoryUnited Kingdom
    CityGlasgow
    Period6/10/199/10/19

    Funding

    This work is part of the ECSEL Joint Undertaking projects 3CCar-662192 and PRYSTINE-783190 which receive support from the European Union Horizon 2020 research and innovation programme. Murata Electronics is acknowledged for the wafer level packaging and metallization of the reflector and Okmetic Oyj for fabricating the SOI wafers.

    Keywords

    • Mirrors
    • Laser radar
    • Actuators
    • Micromechanical devices
    • Laser beams
    • Optical reflection
    • Springs
    • MEMS
    • LIDAR
    • AlN
    • SOI
    • automotive
    • OtaNano

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