Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Tuomas Pensala; Jukka Kyynäräinen; James R. Dekker; Sergey Gorelick; Panu Pekko; Tapio Pernu; Oili M.E. Ylivaara; Feng Gao; Dmitry Morits; Jyrki Kiihamäki

doi:10.1109/ULTSYM.2019.8925660

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Tuomas Pensala, Jukka Kyynäräinen, James R. Dekker, Sergey Gorelick, Panu Pekko, Tapio Pernu, Oili M.E. Ylivaara, Feng Gao, Dmitry Morits, Jyrki Kiihamäki

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

19 Citations (Scopus)

Abstract

Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm³ , and scanning frequency of 1.6 kHz. A tilt angle of +/− 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 V pp .

Original language	English
Title of host publication	2019 IEEE International Ultrasonics Symposium, IUS 2019
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	1977-1980
ISBN (Electronic)	978-1-7281-4596-9, 978-1-7281-4595-2
ISBN (Print)	978-1-7281-4597-6
DOIs	https://doi.org/10.1109/ULTSYM.2019.8925660
Publication status	Published - Oct 2019
MoE publication type	A4 Article in a conference publication
Event	2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom Duration: 6 Oct 2019 → 9 Oct 2019

Conference

Conference	2019 IEEE International Ultrasonics Symposium, IUS 2019
Country/Territory	United Kingdom
City	Glasgow
Period	6/10/19 → 9/10/19

Funding

This work is part of the ECSEL Joint Undertaking projects 3CCar-662192 and PRYSTINE-783190 which receive support from the European Union Horizon 2020 research and innovation programme. Murata Electronics is acknowledged for the wafer level packaging and metallization of the reflector and Okmetic Oyj for fabricating the SOI wafers.

Keywords

Mirrors
Laser radar
Actuators
Micromechanical devices
Laser beams
Optical reflection
Springs
MEMS
LIDAR
AlN
SOI
automotive
OtaNano

Access to Document

10.1109/ULTSYM.2019.8925660

Cite this

Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D., & Kiihamäki, J. (2019). Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications. In 2019 IEEE International Ultrasonics Symposium, IUS 2019 (pp. 1977-1980). Article 8925660 IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/ULTSYM.2019.8925660

@inproceedings{42c80a08c05344efb70a39dbf21da768,

title = "Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications",

abstract = "Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm³ , and scanning frequency of 1.6 kHz. A tilt angle of +/− 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 V pp .",

keywords = "Mirrors, Laser radar, Actuators, Micromechanical devices, Laser beams, Optical reflection, Springs, MEMS, LIDAR, AlN, SOI, automotive, OtaNano",

author = "Tuomas Pensala and Jukka Kyyn{\"a}r{\"a}inen and Dekker, {James R.} and Sergey Gorelick and Panu Pekko and Tapio Pernu and Ylivaara, {Oili M.E.} and Feng Gao and Dmitry Morits and Jyrki Kiiham{\"a}ki",

year = "2019",

month = oct,

doi = "10.1109/ULTSYM.2019.8925660",

language = "English",

isbn = "978-1-7281-4597-6",

pages = "1977--1980",

booktitle = "2019 IEEE International Ultrasonics Symposium, IUS 2019",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "2019 IEEE International Ultrasonics Symposium, IUS 2019 ; Conference date: 06-10-2019 Through 09-10-2019",

}

Pensala, T, Kyynäräinen, J, Dekker, JR, Gorelick, S, Pekko, P, Pernu, T, Ylivaara, OME, Gao, F, Morits, D & Kiihamäki, J 2019, Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications. in 2019 IEEE International Ultrasonics Symposium, IUS 2019., 8925660, IEEE Institute of Electrical and Electronic Engineers, pp. 1977-1980, 2019 IEEE International Ultrasonics Symposium, IUS 2019, Glasgow, United Kingdom, 6/10/19. https://doi.org/10.1109/ULTSYM.2019.8925660

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications. / Pensala, Tuomas; Kyynäräinen, Jukka; Dekker, James R. et al.
2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, 2019. p. 1977-1980 8925660.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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AU - Pensala, Tuomas

AU - Kyynäräinen, Jukka

AU - Dekker, James R.

AU - Gorelick, Sergey

AU - Pekko, Panu

AU - Pernu, Tapio

AU - Ylivaara, Oili M.E.

AU - Gao, Feng

AU - Morits, Dmitry

AU - Kiihamäki, Jyrki

PY - 2019/10

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AB - Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm³ , and scanning frequency of 1.6 kHz. A tilt angle of +/− 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 V pp .

KW - Mirrors

KW - Laser radar

KW - Actuators

KW - Micromechanical devices

KW - Laser beams

KW - Optical reflection

KW - Springs

KW - MEMS

KW - LIDAR

KW - AlN

KW - SOI

KW - automotive

KW - OtaNano

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DO - 10.1109/ULTSYM.2019.8925660

M3 - Conference article in proceedings

SN - 978-1-7281-4597-6

SP - 1977

EP - 1980

BT - 2019 IEEE International Ultrasonics Symposium, IUS 2019

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 2019 IEEE International Ultrasonics Symposium, IUS 2019

Y2 - 6 October 2019 through 9 October 2019

ER -

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Abstract

Conference

Funding

Keywords

Access to Document

Other files and links

Fingerprint

PRYSTINE: Programmable Systems for Intelligence in Automobiles

OtaNano

Cite this

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Abstract

Conference

Funding

Keywords

Access to Document

Other files and links

Fingerprint

Projects

PRYSTINE: Programmable Systems for Intelligence in Automobiles

Equipment

OtaNano

Cite this