Projects per year
Original language | English |
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Publication status | Published - 2017 |
MoE publication type | Not Eligible |
Event | Joint EuroCVD 21 - Baltic ALD 15 Conference - Linköping, Sweden Duration: 11 Jun 2017 → 14 Jun 2017 |
Conference
Conference | Joint EuroCVD 21 - Baltic ALD 15 Conference |
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Country/Territory | Sweden |
City | Linköping |
Period | 11/06/17 → 14/06/17 |
Keywords
- ALD
- XeF2
- etching
- OtaNano
Projects
- 1 Finished
-
ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition
Ylivaara, O. M. E. (PI), Ahopelto, J. (Participant), Puurunen, R. L. (Participant) & Grigoras, K. (Participant)
1/01/12 → 31/12/17
Project: Academy of Finland project