XRR characterization of ALD TiO2/Al2O3 nanolaminates with ultra-thin bilayers

Sakari Sintonen (Corresponding author), Saima Ali, Oili Ylivaara, Riikka L. Puurunen, Harri Lipsanen

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

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    Physics & Astronomy