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• Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

  Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 1977-1980 8925660

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  18 Citations (Scopus)

• Beam-steering MOEMS system based on a resonant piezoMEMS mirror and a phase-locked loop controller

  Ruotsalainen, K. & Morits, D., 5 Mar 2021, MOEMS and Miniaturized Systems XX. Zappe, H., Piyawattanametha, W. & Park, Y.-H. (eds.). International Society for Optics and Photonics SPIE, 12 p. 116970I. (Proceedings of SPIE, Vol. 11697).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

  Open Access

  File
  1 Citation (Scopus)

  168 Downloads (Pure)

• Resonant micromirror with symmetrical AIN thin film actuators: Invited paper

  Ruotsalainen, K., Morits, D., Ylivaara, O. M. E. & Kyynäräinen, J., 3 Oct 2022, Laser Beam Shaping XXII. Dudley, A. & Laskin, A. V. (eds.). International Society for Optics and Photonics SPIE, p. 8 122180B. (Proceedings of SPIE, Vol. 12218).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  1 Citation (Scopus)

• Supporting quantum technologies with an ultralow-loss silicon photonics platform

  Cherchi, M., Bera, A., Kemppinen, A., Nissilä, J., Tappura, K., Caputo, M., Lehtimäki, L., Lehtinen, J., Govenius, J., Hassinen, T., Prunnila, M. & Aalto, T. (Corresponding Author), 6 Apr 2023, In: Advanced Photonics Nexus. 2, 2, 024002.

  Research output: Contribution to journal › Review Article › peer-review

  Open Access

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  77 Downloads (Pure)