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• Low-Loss Converters between Optical Silicon Waveguides of Different Sizes and Types

  Aalto, T., Solehmainen, K., Harjanne, M., Kapulainen, M. & Heimala, P., 2006, In: IEEE Photonics Technology Letters. 18, 5, p. 709-711

  Research output: Contribution to journal › Article › Scientific › peer-review
  50 Citations (Scopus)

• Photonic integrated circuits based on silicon waveguides

  Aalto, T., Harjanne, M., Kapulainen, M., Solehmainen, K., Heimala, P., Mulot, M. & Arpiainen, S., 2006.

  Research output: Contribution to conference › Other conference contribution › Scientific

• Low-loss silicon-on-insulator waveguides

  Solehmainen, K., Aalto, T., Kapulainen, M. & Harjanne, M., 2005, Proceedings of Optics Days 2005. Jyväskylä: Finnish Optical Society, 61

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

  181 Citations (Scopus)

• Development of silicon-on-insulator waveguide technology

  Aalto, T., Harjanne, M., Kapulainen, M., Heimala, P. & Leppihalme, M., 2004, Integrated Optics: Devices, Materials, and Technologies VIII. Sidorin, Y. & Tervonen, A. (eds.). International Society for Optics and Photonics SPIE, p. 81-95 (Proceedings of SPIE, Vol. 5355).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  10 Citations (Scopus)

• Microphotonic silicon waveguide components

  Aalto, T., 2004, Espoo: VTT Technical Research Centre of Finland. (VTT Publications, Vol. 553).

  Research output: Book/Report › Report

  Open Access

• Sub-µs switching time in silicon-on-insulator Mach-Zehnder thermooptic switch

  Harjanne, M., Kapulainen, M., Aalto, T. & Heimala, P., 2004, In: IEEE Photonics Technology Letters. 16, 9, p. 2039-2041

  Research output: Contribution to journal › Article › Scientific › peer-review
  113 Citations (Scopus)

• Fabrication and characterization of waveguide structures on SOI

  Aalto, T., Heimala, P., Yliniemi, S., Kapulainen, M. & Leppihalme, M., 2003, Integrated Optical Devices: Fabrication and Testing. Righini, G. C. (ed.). International Society for Optics and Photonics SPIE, p. 183-194 (Proceedings of SPIE, Vol. 4944).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  10 Citations (Scopus)

• Fabrication of photonic crystal waveguide elements on SOI

  Yliniemi, S., Aalto, T., Heimala, P., Pekko, P., Jefimovs, K. & Uusitupa, T., 2003, Integrated Optical Devices: Fabrication and Testing. Righini, G. C. (ed.). International Society for Optics and Photonics SPIE, p. 23-31 (Proceedings of SPIE, Vol. 4944).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  6 Citations (Scopus)

• Fast thermo-optical switch based on SOI waveguides

  Aalto, T., Kapulainen, M., Yliniemi, S., Heimala, P. & Leppihalme, M., 2003, Integrated Optics: Devices, Materials, and Technologies VII. Sidorin, Y. S. & Tervonen, A. (eds.). International Society for Optics and Photonics SPIE, p. 149-159 (Proceedings of SPIE, Vol. 4987).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  17 Citations (Scopus)

• Performance enhancement and evaluation of deep dry etching on a production cluster platform

  McNie, M., Pickering, C., Rickard, A., Young, I., J. Hopkins, J., Ashraf, H., McAuley, S., Nicholls, G., Barnett, R., Roozeboom, F., Heuvel, E. V. D., Verhoeven, J., Gormley, C., Schina, P., Di Luciano, C., Kiihamäki, J. & Kemmeren, A., 2003, Micromachining and Microfabrication Process Technology VIII. International Society for Optics and Photonics SPIE, p. 34-42 (Proceedings of SPIE, Vol. 4979).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  3 Citations (Scopus)

• Integrated bragg gratings in silicon-on-insulator waveguides

  Aalto, T., Yliniemi, S., Heimala, P., Pekko, P., Simonen, J. & Kuittinen, M., 2002, Integrated Optics: Devices, Materials, and Technologies VI. International Society for Optics and Photonics SPIE, p. 117-124 (Proceedings of SPIE, Vol. 4640).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  9 Citations (Scopus)

• Si-based integrated optical and photonic microstructures

  Leppihalme, M., Aalto, T., Katila, P., Heimala, P., Blomberg, M. & Tammela, S., 2000, Integrated optics devices IV. Righini, G. C. & Honkanen, S. (eds.). International Society for Optics and Photonics SPIE, p. 2-15 (Proceedings of SPIE, Vol. 3936).

  Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
  1 Citation (Scopus)